Filter Air Shower
A Filter Air Shower is a cleanroom entry system that blows high-velocity HEPA- or ULPA-filtered air over personnel or materials to remove loose surface particles before they enter a controlled environment. It is commonly used in pharmaceutical, semiconductor, laboratory, and surgical/medical-device cleanrooms.
How it works
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A person or trolley enters the air-shower chamber.
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Both doors interlock, preventing direct entry into the cleanroom.
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Nozzles discharge filtered air at roughly 18–30 m/s, dislodging dust and particles from garments or material surfaces.
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The contaminated air is drawn through a prefilter and then a HEPA/ULPA filter.
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Cleaned air is recirculated back to the nozzles.
Typical filtration
| Stage | Common specification | Purpose |
|---|---|---|
| Pre-filter | Around 85% arrestance or G4/ EU7 grade | Captures larger dust and extends HEPA life. |
| HEPA filter | Typically 99.97–99.99% at 0.3 micron | Main filtration for cleanroom entry. |
| ULPA filter | Up to 99.9995% at 0.12 micron | Used for higher-cleanliness or critical applications. |
Other Specifications:
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Type: Single-person, double-person, tunnel/linear, or cargo/material air shower.
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Filter grade: H13/H14 HEPA or U15/U16 ULPA, with DOP/PAO test port.
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Nozzle air velocity: Usually 20–30 m/s.
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Cycle time: Often adjustable, commonly 0–99 seconds.